ARC PRECISION ENGINEERING CO., LTD. SEMICONDUCTOR CRITICAL COMPONENTS MANUFACTURER

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SEMICONDUCTOR SILICON RING SILICON ELECTRODE

SPECIFICATION

WE ARE MANUFACTURING SILICON RING SILICON UPPER ELECTRODE

INSIDE DIAMETER	WAFER SIZE	EQUIPMENT MANUFACTURER	MATERIAL	OTHER SPECIFICATION
100MM	4INCH	PANASONIC,HITACH,OTHERS	HIGH PURITY SILICON	ACCORDING TO THE USER
150MM	6INCH	PANASONIC,HITACH,OTHERS	HIGH PURITY SILICON	ACCORDING TO THE USER
200MM	8INCH	AMAT，LAM，TEL，OTHERS	HIGH PURITY SILICON	ACCORDING TO THE USER
300MM	12INCH	AMAT，LAM，TEL，OTHERS	HIGH PURITY SILICON	ACCORDING TO THE USER
450MM	18INCH	OTHER	HIGH PURITY SILICON	ACCORDING TO THE USER

LAST QUARTZ ETCH RING

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