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CMP RETAINER RING
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QUARTZ ETCH RING
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SILICON ETCH RING
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SHOWER HEAD
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VACUUM CHUCK
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PMMA INSULATOR PLATE
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PTFE BELLOWS
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SPIRAL GASKET
- +86-18241249067
+86-13009453735 - +86-411-8718-9285
- +86-411-8718-9293
- info@arc-pe.com
- arcpeinfo
- 10-7-3,DONGBEI 7TH STREET,DEVELOPMENT ZONE, DALIAN, 116600 CHINA.
CMP RETAINER RING - High-Quality Semiconductor Components


















- SPECIFICATION
ARC PRECISION ENGINEERING CO., LTD. - Manufacturing High-Quality CMP RETAINER RING
What is CMP RETAINER RING or CMP RETAINING RING, WAFER GUIDE RING etc, CMP RETAINER RING is installed at the bottom of the grinding head to fix the wafer and drive the wafer to rotate with the grinding head to achieve the grinding and polishing effect on the surface of the wafer. It is an important part of the CMP equipment.
Chemical mechanical polishing (CMP) is one of the key processes in semiconductor manufacturing today. In recent years, as the wafer size has become larger, the chip size has become smaller, and the circuit wiring has become thinner. To obtain the ideal coating film thickness and the requirements of coating on an ideal plane during the manufacturing process, the precision requirements of the peripheral components in the CMP process are becoming more and more stringent.
In the CMP process, the CMP RETAINER RING will be in contact with various materials of slurry, and The CMP RETAINER RING is required to be resistant to chemical corrosion and wear. It also needs to be able to withstand mechanical loads and should have good elasticity, toughness and strength. In order to increase the yield without damaging the wafer, the CMP RETAINER RING also requires extremely high dimensional accuracy.
Chemical mechanical polishing (CMP) is a key process in semiconductor manufacturing. As the wafer size has become larger, the chip size has become smaller, and the circuit wiring has become thinner, the precision requirements of the peripheral components in the CMP process, such as the CMP RETAINER RING, are becoming more and more stringent.
Our CMP RETAINER RING is manufactured using high-quality engineering plastic materials, including PPS, PEEK, and PEEK quenched and tempered materials, to ensure high chemical corrosion resistance and wear resistance. It also needs to be able to withstand mechanical loads and should have good elasticity, toughness, and strength. In order to increase the yield without damaging the wafer, our CMP RETAINER RING also meets extremely high dimensional accuracy requirements.
CMP RETAINER RING
The PRODUCT FEATURES of CMP RETAINER RING produced by our company:
1. RAW MATERIALS: We use high-quality engineering plastic materials, including PPS, PEEK, and PEEK quenched and tempered materials, to ensure high chemical corrosion resistance and wear resistance.
2. MANUFACTURING PROCESS: We follow extremely high product flatness management standards, which help to reduce unnecessary foreign body scratches caused by the CMP RETAINER RING and provide better wafer TTV value compared to other manufacturers' products.
3. CLEANING PROCESS: We use excellent surface treatment technology and cleaning methods to reduce unnecessary foreign body scratches caused by the CMP RETAINER RING.
4. PRICE ADVANTAGE: Relying on China's strong raw material supply capacity and large-scale production, we offer more competitive prices compared to our competitors.
5. JOINT RESEARCH & DEVELOPMENT: We work closely with our customers to improve our products and meet their various process requirements.
6.REFURBISHMENT:We can also provide customers with refurbishment and regeneration services for used products, which can reduce procurement costs for customers and be more environmentally friendly.
7.QUALITY CONTROL: We have strict quality control measures in place to ensure the consistency and reliability of our CMP RETAINER RING products. Each product is inspected and tested before shipment to ensure that it meets our high standards.
8.CUSTOMER SERVICE: Our team is dedicated to providing exceptional customer service and support. We work closely with our customers to understand their needs and requirements, and we strive to exceed their expectations in every way possible.
At ARC Precision Engineering Co., Ltd., we are committed to providing the highest quality semiconductor critical spare parts, including CMP RETAINER RING. Our products are designed and manufactured to meet the most stringent requirements of the semiconductor industry, and we are proud to be a trusted partner of many leading semiconductor manufacturers worldwide.
If you have any questions or would like to learn more about our CMP RETAINER RING products and services, please do not hesitate to contact us. We look forward to hearing from you and working with you to meet your semiconductor manufacturing needs.
INSIDE DIAMETER | WAFER SIZE | EQUIPMENT MANUFACTURER | MATERIAL | OTHER SPECIFICATION |
100MM | 4INCH | ACCRETECH | PEEK,PPS, PEEK&SUS, PPS&SUS | ACCORDING TO THE USER |
150MM | 6INCH | ACCRETECH | PEEK,PPS, PEEK&SUS, PPS&SUS | ACCORDING TO THE USER |
200MM | 8INCH | AMAT,EBARA,STRASBAUGH | PEEK,PPS, PEEK&SUS, PPS&SUS | ACCORDING TO THE USER |
300MM | 12INCH | AMAT,EBARA,STRASBAUGH | PEEK,PPS, PEEK&SUS, PPS&SUS | ACCORDING TO THE USER |
450MM | 18INCH | OTHER | PEEK,PPS, PEEK&SUS, PPS&SUS | ACCORDING TO THE USER |